TiN Thin Films Preparation, Structural and Electrical Proberties |
| Journal |
Solid State Phenomena (Volumes 39 - 40) |
| Volume |
Systems with Fast Ionic Transport - IV |
| Edited by |
Wladyslaw Bogusz, Waclaw Jakubowski and Franciszek Krok |
| Pages |
139-142 |
| DOI |
10.4028/www.scientific.net/SSP.39-40.139 |
| Citation |
A. Tarniowy et al., 1994, Solid State Phenomena, 39-40, 139 |
| Authors |
A. Tarniowy, R. Mania, M. Rekas |
| Keywords |
AES, Electrical Conductivity, TEM, Thin Film, Titanium Nitride, X-Ray Diffraction (XRD) |
| Full Paper |
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