Hydrogenated Amorphous Silicon

Selected Properties of Hydrogenated Amorphous Silicon and Silicon-Carbon Alloys

Authors: F. Alvarez, L.R. Tessler

On the Atomic Structure of Amorphous Semiconductors

Authors: L. Pusztai

Physics of Device Grade Amorphous Silicon

Authors: R.M. Mehra, P.C. Mathur, P.Craig Taylor

Very High Frequency Glow Discharge: Plasma- and Deposition Aspects

Authors: H. Keppner, U. Kroll, J. Meier, A. Shah

Hydrogen-Plasma Treated CVD Amorphous Silicon: Growth and Properties

Authors: I. Sakata, Mitsugu Yamanaka, Toshihiro Sekigawa, Yoshikazu Hayashi

Growth of Hydrogenated Amorphous Silicon in Electron Cyclotron Resonance Plasma

Authors: M. Zhang, Yukihiro Nakayama

Diagnostics of High-Rate a-Si:H Deposition in a Variable Frequency Plasma

Authors: M. Heintze

Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure

Authors: U.I. Schmidt, T. Haage, B. Schröder

Plasma Kinetics, Surface Phenomena and Growth Mechanism in Hydrogenated Amorphous Silicon: Transition from Amorphous to Micro- and Nano-Crystalline Si:H

Authors: D. Das

Luminescence of Porous and Amorphous Hydrogenated Silicon: Analogies and Differences

Authors: L. Pavesi