Hydrogen-Plasma Treated CVD Amorphous Silicon: Growth and Properties |
| Journal |
Solid State Phenomena (Volumes 44 - 46) |
| Volume |
Hydrogenated Amorphous Silicon |
| Edited by |
Hans Neber-Aeschbacher |
| Pages |
127-134 |
| DOI |
10.4028/www.scientific.net/SSP.44-46.127 |
| Citation |
I. Sakata et al., 1995, Solid State Phenomena, 44-46, 127 |
| Authors |
I. Sakata, Mitsugu Yamanaka, Toshihiro Sekigawa, Yoshikazu Hayashi |
| Keywords |
a-Si:H, Chemical Vapour Deposition (CVD), Hydrogen Plasma Treatments, Light-Induced Changes |
| Full Paper |
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