Paper Title:
Growth of Hydrogenated Amorphous Silicon in Electron Cyclotron Resonance Plasma
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 44-46)
Edited by
Hans Neber-Aeschbacher
Pages
135-180
DOI
10.4028/www.scientific.net/SSP.44-46.135
Citation
M. Zhang, Y. Nakayama, "Growth of Hydrogenated Amorphous Silicon in Electron Cyclotron Resonance Plasma", Solid State Phenomena, Vols. 44-46, pp. 135-180, 1995
Online since
July 1995
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.