Paper Title:
Diagnostics of High-Rate a-Si:H Deposition in a Variable Frequency Plasma
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 44-46)
Edited by
Hans Neber-Aeschbacher
Pages
181-194
DOI
10.4028/www.scientific.net/SSP.44-46.181
Citation
M. Heintze, "Diagnostics of High-Rate a-Si:H Deposition in a Variable Frequency Plasma", Solid State Phenomena, Vols. 44-46, pp. 181-194, 1995
Online since
July 1995
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Price
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