Ellipsometric Studies of a-Si:H Film Growth, Density and Microstructure |
| Journal |
Solid State Phenomena (Volumes 44 - 46) |
| Volume |
Hydrogenated Amorphous Silicon |
| Edited by |
Hans Neber-Aeschbacher |
| Pages |
195-226 |
| DOI |
10.4028/www.scientific.net/SSP.44-46.195 |
| Citation |
U.I. Schmidt et al., 1995, Solid State Phenomena, 44-46, 195 |
| Authors |
U.I. Schmidt, T. Haage, B. Schröder |
| Keywords |
Density Determination, Ellipsometric Data Interpretation, Initial Transient Stage of Discharge, Kinetic Ellipsometry, Laser Light Scattering, Particle Formation, Process Control, Solar Cell Optimisation, Spectroscopic Ellipsometry (SE), Tetrahedron Model |
| Full Paper |
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