Plasma Kinetics, Surface Phenomena and Growth Mechanism in Hydrogenated Amorphous Silicon: Transition from Amorphous to Micro- and Nano-Crystalline Si:H |
| Journal |
Solid State Phenomena (Volumes 44 - 46) |
| Volume |
Hydrogenated Amorphous Silicon |
| Edited by |
Hans Neber-Aeschbacher |
| Pages |
227-260 |
| DOI |
10.4028/www.scientific.net/SSP.44-46.227 |
| Citation |
D. Das, 1995, Solid State Phenomena, 44-46, 227 |
| Authors |
D. Das |
| Keywords |
Chemical Annealing by Atomic Hydrogen, Growth-Zone, Hydrogen Chemical Potential, Hydrogen Coverage, Interrupted Growth, Nanocrystallisation |
| Full Paper |
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