Paper Title:
Very High Frequency Glow Discharge: Plasma- and Deposition Aspects
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 44-46)
Edited by
Hans Neber-Aeschbacher
Pages
97-126
DOI
10.4028/www.scientific.net/SSP.44-46.97
Citation
H. Keppner, U. Kroll, J. Meier, A. Shah, "Very High Frequency Glow Discharge: Plasma- and Deposition Aspects", Solid State Phenomena, Vols. 44-46, pp. 97-126, 1995
Online since
July 1995
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Price
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