Gettering and Defect Engineering in Semiconductor Technology VI

Trends and Challenges for Advanced Silicon Technologies

Authors: C. Claeys, L. Deferm

Needs of Low Thermal Budget Processing in SiGe Technology

Authors: U. König, J. Hersener

History and Future of Semiconductor Wafer Bonding

Authors: U.M. Gösele, H. Stenzel, Manfred Reiche, T. Martini, H. Steinkirchner, Q.-Y. Tong

Building the Electron Superhighway: Back-End Processing and Simulation

Authors: F.H. Baumann

Role of Interstitial Atoms in Microscopic Processes on (113) and (001) Surfaces of Silicon

Authors: Jaroslaw Dąbrowski, Hans Joachim Müssig, G. Wolff

Silicon Materials and Metrology: Critical Concepts for Optimal IC Performance in the Gigabit Era

Authors: Howard R. Huff, R.K. Goodall

Expected Limits for Manufacturing Very Large Silicon Wafers

Authors: W. v. Ammon

Diameter Effects on Grown-In Defects in CZ Crystal Growth

Authors: F. Uberti, K. Hagimoto

Silicon Carbide - A Promising Wide-Band-Gap Semiconductor for Electronic Devices

Authors: Gerhard Pensl, T. Troffer

Multicrystalline Silicon for Solar Cells

Authors: Hans Joachim Möller