Gettering and Defect Engineering in Semiconductor Technology VI
Solid State Phenomena Volumes 47 - 48
doi:10.4028/www.scientific.net/SSP.47-48
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p1
Trends and Challenges for Advanced Silicon Technologies
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1 M
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Authors: C. Claeys, L. Deferm
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p17
Needs of Low Thermal Budget Processing in SiGe Technology
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1 M
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Authors: U. König, J. Hersener
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p33
History and Future of Semiconductor Wafer Bonding
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758 K
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Authors: U.M. Gösele, H. Stenzel, Manfred Reiche, T. Martini, H. Steinkirchner, Q.-Y. Tong
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p45
Building the Electron Superhighway: Back-End Processing and Simulation
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595 K
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Authors: F.H. Baumann
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p57
Role of Interstitial Atoms in Microscopic Processes on (113) and (001) Surfaces of Silicon
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417 K
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Authors: Jaroslaw Dąbrowski, Hans Joachim Müssig, G. Wolff
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p65
Silicon Materials and Metrology: Critical Concepts for Optimal IC Performance in the Gigabit Era
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1 M
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Authors: Howard R. Huff, R.K. Goodall
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p97
Expected Limits for Manufacturing Very Large Silicon Wafers
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784 K
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Authors: W. v. Ammon
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p107
Diameter Effects on Grown-In Defects in CZ Crystal Growth
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507 K
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Authors: F. Uberti, K. Hagimoto
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p115
Silicon Carbide - A Promising Wide-Band-Gap Semiconductor for Electronic Devices
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634 K
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Authors: Gerhard Pensl, T. Troffer
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p127
Multicrystalline Silicon for Solar Cells
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1 M
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Authors: Hans Joachim Möller
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p143
Room Temperature UHV Silicon Direct Bonding
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631 K
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Authors: F. Shi, G. Elssner, Manfred Reiche, U.M. Gösele
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p153
External Gettering for Multicrystalline Silicon Wafers
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792 K
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Authors: Santo Martinuzzi, Isabelle Périchaud
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p165
Gettering of Transition Metals in Multicrystalline Silicon for Photovoltaic Applications
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241 K
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Authors: Eicke R. Weber, Scott A. McHugo, H. Hieslmair
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p171
Gettering of Au in Heat Treated Si/SiGe/Si Structures
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281 K
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Authors: K. Schmalz, D. Krüger, R. Kurps, T. Morgenstern, H.P. Zeindl
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p177
Gettering of Low Concentration Copper, Nickel and Iron Contamination in Czochralski Silicon Wafers
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803 K
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Authors: Z. Laczik, L. Bouwhuis, G.R. Booker, Robert J. Falster