Paper Title:
Trends and Challenges for Advanced Silicon Technologies
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
1-16
DOI
10.4028/www.scientific.net/SSP.47-48.1
Citation
C. Claeys, L. Deferm, "Trends and Challenges for Advanced Silicon Technologies", Solid State Phenomena, Vols. 47-48, pp. 1-16, 1996
Online since
July 1995
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Price
$32.00
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