Room Temperature UHV Silicon Direct Bonding |
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| Journal | Solid State Phenomena (Volumes 47 - 48) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology VI |
| Edited by | H. Richter, M. Kittler and C. Claeys |
| Pages | 143-152 |
| DOI | 10.4028/www.scientific.net/SSP.47-48.143 |
| Citation | F. Shi et al., 1995, Solid State Phenomena, 47-48, 143 |
| Authors | F. Shi, G. Elssner, Manfred Reiche, U.M. Gösele |
| Full Paper | 
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