Paper Title:
Room Temperature UHV Silicon Direct Bonding
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
143-152
DOI
10.4028/www.scientific.net/SSP.47-48.143
Citation
F. Shi, G. Elssner, M. Reiche, U.M. Gösele, "Room Temperature UHV Silicon Direct Bonding", Solid State Phenomena, Vols. 47-48, pp. 143-152, 1996
Online since
July 1995
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.