Needs of Low Thermal Budget Processing in SiGe Technology |
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| Journal | Solid State Phenomena (Volumes 47 - 48) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology VI |
| Edited by | H. Richter, M. Kittler and C. Claeys |
| Pages | 17-32 |
| DOI | 10.4028/www.scientific.net/SSP.47-48.17 |
| Citation | U. König et al., 1995, Solid State Phenomena, 47-48, 17 |
| Authors | U. König, J. Hersener |
| Full Paper | 
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