Paper Title:
Gettering of Au in Heat Treated Si/SiGe/Si Structures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
171-176
DOI
10.4028/www.scientific.net/SSP.47-48.171
Citation
K. Schmalz, D. Krüger, R. Kurps, T. Morgenstern, H.P. Zeindl, "Gettering of Au in Heat Treated Si/SiGe/Si Structures", Solid State Phenomena, Vols. 47-48, pp. 171-176, 1996
Online since
July 1995
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Price
$32.00
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