Gettering of Au in Heat Treated Si/SiGe/Si Structures |
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| Journal | Solid State Phenomena (Volumes 47 - 48) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology VI |
| Edited by | H. Richter, M. Kittler and C. Claeys |
| Pages | 171-176 |
| DOI | 10.4028/www.scientific.net/SSP.47-48.171 |
| Citation | K. Schmalz et al., 1995, Solid State Phenomena, 47-48, 171 |
| Authors | K. Schmalz, D. Krüger, R. Kurps, T. Morgenstern, H.P. Zeindl |
| Full Paper | 
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