Paper Title:
Gettering of Low Concentration Copper, Nickel and Iron Contamination in Czochralski Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
177-182
DOI
10.4028/www.scientific.net/SSP.47-48.177
Citation
Z. Laczik, L. Bouwhuis, G.R. Booker, R. J. Falster, "Gettering of Low Concentration Copper, Nickel and Iron Contamination in Czochralski Silicon Wafers", Solid State Phenomena, Vols. 47-48, pp. 177-182, 1996
Online since
July 1995
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Price
$32.00
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