Paper Title:
Defect Engineering for Silicon-on-Insulator, MeV Implantation and Low Temperature Processing
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
183-194
DOI
10.4028/www.scientific.net/SSP.47-48.183
Citation
S. V. Koveshnikov, A. K. Agarwal, K.L. Beaman, G. A. Rozgonyi, "Defect Engineering for Silicon-on-Insulator, MeV Implantation and Low Temperature Processing", Solid State Phenomena, Vols. 47-48, pp. 183-194, 1996
Online since
July 1995
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Price
$32.00
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