Paper Title:
Defect Engineering for Silicon-on-Insulator, MeV Implantation and Low Temperature Processing
| Periodical | Solid State Phenomena (Volumes 47 - 48) |
|---|---|
| Main Theme | Gettering and Defect Engineering in Semiconductor Technology VI |
| Edited by | H. Richter, M. Kittler and C. Claeys |
| Pages | 183-194 |
| DOI | 10.4028/www.scientific.net/SSP.47-48.183 |
| Citation | Sergei V. Koveshnikov et al., 1995, Solid State Phenomena, 47-48, 183 |
| Authors | Sergei V. Koveshnikov, Anant K. Agarwal, K.L. Beaman, George A. Rozgonyi |
| Price | US$ 28,- |
View full size
