Paper Title:
Behaviour of the Size Distribution Function of End-of-Range Dislocation Loops during Silicon Oxidation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
205-210
DOI
10.4028/www.scientific.net/SSP.47-48.205
Citation
M. Seibt, E. Spiecker, "Behaviour of the Size Distribution Function of End-of-Range Dislocation Loops during Silicon Oxidation", Solid State Phenomena, Vols. 47-48, pp. 205-210, 1996
Online since
July 1995
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Price
$32.00
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