Paper Title:
SiC Buried Layer Formation Induced by Ion Implantation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
211-216
DOI
10.4028/www.scientific.net/SSP.47-48.211
Citation
N.I. Klyui, D. Krüger, B.N. Romanyuk, V.G. Litovchenko, H. Richter, "SiC Buried Layer Formation Induced by Ion Implantation", Solid State Phenomena, Vols. 47-48, pp. 211-216, 1996
Online since
July 1995
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Price
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