Paper Title:
Point Defect Concentrations, Distributions and Diffusivity in Thin Si MBE-Films: Experiments and Simulations Based on Profiling of Implanted Multiple Delta Doping Structures
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Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
313-318
DOI
10.4028/www.scientific.net/SSP.47-48.313
Citation
D. Krüger, R. Kurps, H.P. Zeindl, U. Jagdhold, "Point Defect Concentrations, Distributions and Diffusivity in Thin Si MBE-Films: Experiments and Simulations Based on Profiling of Implanted Multiple Delta Doping Structures", Solid State Phenomena, Vols. 47-48, pp. 313-318, 1996
Online since
July 1995
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