Paper Title:
A Study of Defects Generated by BF2+ Implantation in Silicon Crystals and Their Annealing
  Abstract

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Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
377-382
DOI
10.4028/www.scientific.net/SSP.47-48.377
Citation
K. Lal, G. Bhagavannarayana, G.S. Virdi, "A Study of Defects Generated by BF2+ Implantation in Silicon Crystals and Their Annealing", Solid State Phenomena, Vols. 47-48, pp. 377-382, 1996
Online since
July 1995
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Price
$32.00
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