Paper Title:
Ion Beam Sputter Deposited Si0.8Ge0.2Epilayers: Lattice Defects and Surface Topology
| Periodical |
Solid State Phenomena (Volumes 47 - 48)
|
| Main Theme |
Gettering and Defect Engineering in Semiconductor Technology VI
|
| Edited by |
H. Richter, M. Kittler and C. Claeys |
| Pages |
431-436 |
| DOI |
10.4028/www.scientific.net/SSP.47-48.431 |
| Citation |
V. Demuth et al., 1995, Solid State Phenomena, 47-48, 431 |
| Authors |
V. Demuth, W. Dorsch, Horst P. Strunk, M. Lyakas, M. Eizenberg, N. Mosleh, F. Meyer, C. Schwebel |
| Price |
US$ 28,- |