Paper Title:

Ion Beam Sputter Deposited Si0.8Ge0.2Epilayers: Lattice Defects and Surface Topology

Periodical Solid State Phenomena (Volumes 47 - 48)
Main Theme Gettering and Defect Engineering in Semiconductor Technology VI
Edited by H. Richter, M. Kittler and C. Claeys
Pages 431-436
DOI 10.4028/www.scientific.net/SSP.47-48.431
Citation V. Demuth et al., 1995, Solid State Phenomena, 47-48, 431
Authors V. Demuth, W. Dorsch, Horst P. Strunk, M. Lyakas, M. Eizenberg, N. Mosleh, F. Meyer, C. Schwebel
Price US$ 28,-
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