Paper Title:
Investigation of the Substrate / Epitaxial Interface of Si/Si1-xGexGrown by LPCVD
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
485-490
DOI
10.4028/www.scientific.net/SSP.47-48.485
Citation
R. Loo, L. Vescan, C. Dieker, D. Freundt, A. Hartmann, A. Mück, "Investigation of the Substrate / Epitaxial Interface of Si/Si1-xGexGrown by LPCVD", Solid State Phenomena, Vols. 47-48, pp. 485-490, 1996
Online since
July 1995
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