Paper Title:
TEM Analysis of Structure Modification Induced by Additional Carbon Incorporation in Silicon and Si1-xGex Layers Grown with Molecular Beam Epitaxy
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Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
595-600
DOI
10.4028/www.scientific.net/SSP.47-48.595
Citation
E. Bugiel, S. Ruvimov, H.J. Osten, "TEM Analysis of Structure Modification Induced by Additional Carbon Incorporation in Silicon and Si1-xGex Layers Grown with Molecular Beam Epitaxy", Solid State Phenomena, Vols. 47-48, pp. 595-600, 1996
Online since
July 1995
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