An Analysis of Residual Strain in Dry Etched Semiconductor Nanostructures |
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| Journal | Solid State Phenomena (Volumes 47 - 48) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology VI |
| Edited by | H. Richter, M. Kittler and C. Claeys |
| Pages | 613-0 |
| DOI | 10.4028/www.scientific.net/SSP.47-48.613 |
| Citation | Y.S. Tang et al., 1995, Solid State Phenomena, 47-48, 613 |
| Authors | Y.S. Tang, Clivia M. Sotomayor Torres |
| Full Paper | 
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