Silicon Materials and Metrology: Critical Concepts for Optimal IC Performance in the Gigabit Era |
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| Journal | Solid State Phenomena (Volumes 47 - 48) |
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| Volume | Gettering and Defect Engineering in Semiconductor Technology VI |
| Edited by | H. Richter, M. Kittler and C. Claeys |
| Pages | 65-96 |
| DOI | 10.4028/www.scientific.net/SSP.47-48.65 |
| Citation | Howard R. Huff et al., 1995, Solid State Phenomena, 47-48, 65 |
| Authors | Howard R. Huff, R.K. Goodall |
| Full Paper | 
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