Paper Title:
Silicon Materials and Metrology: Critical Concepts for Optimal IC Performance in the Gigabit Era
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
65-96
DOI
10.4028/www.scientific.net/SSP.47-48.65
Citation
H. R. Huff, R.K. Goodall, "Silicon Materials and Metrology: Critical Concepts for Optimal IC Performance in the Gigabit Era", Solid State Phenomena, Vols. 47-48, pp. 65-96, 1996
Online since
July 1995
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Price
$32.00
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