Paper Title:
Expected Limits for Manufacturing Very Large Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 47-48)
Edited by
H. Richter, M. Kittler and C. Claeys
Pages
97-106
DOI
10.4028/www.scientific.net/SSP.47-48.97
Citation
W. v. Ammon, "Expected Limits for Manufacturing Very Large Silicon Wafers", Solid State Phenomena, Vols. 47-48, pp. 97-106, 1996
Online since
July 1995
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