Expected Limits for Manufacturing Very Large Silicon Wafers |
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| Journal | Solid State Phenomena (Volumes 47 - 48) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology VI |
| Edited by | H. Richter, M. Kittler and C. Claeys |
| Pages | 97-106 |
| DOI | 10.4028/www.scientific.net/SSP.47-48.97 |
| Citation | W. v. Ammon, 1995, Solid State Phenomena, 47-48, 97 |
| Authors | W. v. Ammon |
| Full Paper | 
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