Paper Title:
Preparation of Low Temperature Polysilicon Films with SiH4 and SiF4 Gas Mixtures
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
149-154
DOI
10.4028/www.scientific.net/SSP.51-52.149
Citation
H.S. Choi, K.H. Jang, M. K. Han, "Preparation of Low Temperature Polysilicon Films with SiH4 and SiF4 Gas Mixtures", Solid State Phenomena, Vols. 51-52, pp. 149-154, 1996
Online since
May 1996
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Price
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