Paper Title:
Growth of -Type Microcrystalline Silicon at Different Plasma Excitation Frequencies
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
161-166
DOI
10.4028/www.scientific.net/SSP.51-52.161
Citation
P. Hapke, M. Luysberg, R. Carius, M. Tzolov, F. Finger, H. Wagner, "Growth of -Type Microcrystalline Silicon at Different Plasma Excitation Frequencies", Solid State Phenomena, Vols. 51-52, pp. 161-166, 1996
Online since
May 1996
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