Paper Title:
Microstructure Influence on the First Stage of the Oxidation Process in Polycrystalline SiGe Layers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
199-204
DOI
10.4028/www.scientific.net/SSP.51-52.199
Citation
J.C. Ferrer, J.J. Pedroviejo, B. Garrido, J.R. Morante, J. Calderer, "Microstructure Influence on the First Stage of the Oxidation Process in Polycrystalline SiGe Layers", Solid State Phenomena, Vols. 51-52, pp. 199-204, 1996
Online since
May 1996
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Price
$32.00
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