Paper Title:
Structural Characterization of Poly-SiC Grown on SiO2/Si by Metalorganic Chemical Vapor Deposition
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
217-224
DOI
10.4028/www.scientific.net/SSP.51-52.217
Citation
J. Rodríguez-Viejo, J. Stoemenos, N. Clavaguera, M. T. Clavaguera-Mora, "Structural Characterization of Poly-SiC Grown on SiO2/Si by Metalorganic Chemical Vapor Deposition", Solid State Phenomena, Vols. 51-52, pp. 217-224, 1996
Online since
May 1996
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Price
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