Paper Title:
Structure and Optical Properties of Hydrogenated Silicon Films Prepared by Plasma Enhanced Chemical Vapour Deposition
  Abstract

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Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
249-254
DOI
10.4028/www.scientific.net/SSP.51-52.249
Citation
A.A. Andreev, A. V. Andrianov, B.Y. Averboukh, R. Mavljanov, S.B. Aldabergenova, M. Albrecht, H. P. Strunk, "Structure and Optical Properties of Hydrogenated Silicon Films Prepared by Plasma Enhanced Chemical Vapour Deposition", Solid State Phenomena, Vols. 51-52, pp. 249-254, 1996
Online since
May 1996
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Price
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