Paper Title:
Influence of the Technological Parameters on the Mechanical Properties of Thick Epipolysilicon Layers for Micromechanical Sensors
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
423-428
DOI
10.4028/www.scientific.net/SSP.51-52.423
Citation
M.S. Benrakkad, J.M. Lopez-Villegas, J.R. Morante, M. Offenberg, "Influence of the Technological Parameters on the Mechanical Properties of Thick Epipolysilicon Layers for Micromechanical Sensors", Solid State Phenomena, Vols. 51-52, pp. 423-428, 1996
Online since
May 1996
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Price
$32.00
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