Paper Title:
Hydrogen Ion-Implantation Induced Gettering Effects in Polycrystalline Silicon
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
491-496
DOI
10.4028/www.scientific.net/SSP.51-52.491
Citation
Z. Shi, F. Yun, A.W. Simonian, "Hydrogen Ion-Implantation Induced Gettering Effects in Polycrystalline Silicon", Solid State Phenomena, Vols. 51-52, pp. 491-496, 1996
Online since
May 1996
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Price
$32.00
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