Paper Title:
Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
561-566
DOI
10.4028/www.scientific.net/SSP.51-52.561
Citation
M. Rydberg, U. Smith, A. Söderbärg, H. Hansson, "Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors", Solid State Phenomena, Vols. 51-52, pp. 561-566, 1996
Online since
May 1996
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Price
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