Deposition and Characterisation of Polycrystalline Silicon for Low Temperature Thin Film Transistor Fabrication |
| Journal |
Solid State Phenomena (Volumes 51 - 52) |
| Volume |
Polycrystalline Semiconductors IV |
| Edited by |
S. Pizzini, H.P. Strunk and J.H. Werner |
| Pages |
609-614 |
| DOI |
10.4028/www.scientific.net/SSP.51-52.609 |
| Citation |
L.J. Quinn et al., 1996, Solid State Phenomena, 51-52, 609 |
| Authors |
L.J. Quinn, B. Lee, P.T. Baine, S.J.N. Mitchell, B.M. Armstrong, H.S. Gamble |
| Keywords |
Atomic Force Microscope (AFM), Fluorine, Hydrogenation, Thin Film Transistor |
| Full Paper |
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