Paper Title:
Deposition and Characterisation of Polycrystalline Silicon for Low Temperature Thin Film Transistor Fabrication
  Abstract

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Periodical
Solid State Phenomena (Volumes 51-52)
Edited by
S. Pizzini, H.P. Strunk and J.H. Werner
Pages
609-614
DOI
10.4028/www.scientific.net/SSP.51-52.609
Citation
L.J. Quinn, B. Lee, P.T. Baine, S.J.N. Mitchell, B.M. Armstrong, H.S. Gamble, "Deposition and Characterisation of Polycrystalline Silicon for Low Temperature Thin Film Transistor Fabrication", Solid State Phenomena, Vols. 51-52, pp. 609-614, 1996
Online since
May 1996
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Price
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