Investigations for the Detection of Microdefects in Cast Multicrystalline Silicon |
| Journal |
Solid State Phenomena (Volumes 51 - 52) |
| Volume |
Polycrystalline Semiconductors IV |
| Edited by |
S. Pizzini, H.P. Strunk and J.H. Werner |
| Pages |
87-92 |
| DOI |
10.4028/www.scientific.net/SSP.51-52.87 |
| Citation |
E. Wolf et al., 1996, Solid State Phenomena, 51-52, 87 |
| Authors |
E. Wolf, D. Klinger, S. Bergmann |
| Keywords |
Chemomechanical Polishing, Cooper and Iron Decoration, Microdefect, Optical Microscopy, Preferential Etching, Structural Characterisation |
| Full Paper |
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