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AFM and STM Investigations of Electroluminescent SiO2/Si Superlattices Prepared by Chemical Vapour Deposition

Journal Solid State Phenomena (Volume 54)
Volume Light Emission from Silicon
Edited by Aldo Ferrari
Pages 13-20
DOI 10.4028/www.scientific.net/SSP.54.13
Citation L. Heikkilä et al., 1997, Solid State Phenomena, 54, 13
Authors L. Heikkilä, T. Kuusela, H.-P. Hedman, A. Pavlov, H. Ihantola
Keywords Atomic Force Microscope (AFM), Chemical Vapour Deposition (CVD), Electroluminescence, SiO2/Si Superlattice, STM
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