Humidity Sensor Based on Partially Oxidized Porous Silicon |
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| Journal | Solid State Phenomena (Volume 54) |
|---|---|
| Volume | Light Emission from Silicon |
| Edited by | Aldo Ferrari |
| Pages | 75-85 |
| DOI | 10.4028/www.scientific.net/SSP.54.75 |
| Citation | Marco Balucani et al., 1997, Solid State Phenomena, 54, 75 |
| Authors | Marco Balucani, V. Bondarenko, L. Dolgyi, S. La Monica, G. Maiello, G. Masini, V. Yakovtseva, A. Ferrari |
| Keywords | Humidity Sensor, Porous Silicon (PS), Sensor |
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