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Annealing Behaviour of High Energy 120Sn Implanted GaAs

Journal Solid State Phenomena (Volume 55)
Volume Semiconductor Materials and Technology
Edited by R.M. Mehra and P.C. Mathur
Pages 98-100
DOI 10.4028/www.scientific.net/SSP.55.98
Citation Y.P. Ali et al., 1997, Solid State Phenomena, 55, 98
Authors Y.P. Ali, V.P. Salvi, A.M. Narsale, B.M. Arora, D. Kanjilal, G.K. Mehta
Keywords Annealing, GaAs, MeV Ion Implantation, Radiation Damage
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