Gettering and Defect Engineering in Semiconductor Technology VII
Solid State Phenomena Volumes 57 - 58
doi:10.4028/www.scientific.net/SSP.57-58
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p4
Preface
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13 K
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p1
Design: New Material Challenge for Silicon ULSI
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276 K
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Authors: Lionel C. Kimerling
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p9
Silicon Wafer Technology: The Challenges towards the Gigabit Era
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603 K
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Authors: A.P. Mozer
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p19
Hydrogen Annealed Silicon Wafer
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318 K
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Authors: S. Nadahara, H. Kubota, S. Samata
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p27
Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal
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355 K
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Authors: R. Habu, Kazuto Kawakami, Mitsuhiro Hasebe
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p37
CZ Crystal Growth Development in Super Silicon Crystal Project
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142 K
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Authors: H. Yamagishi, M. Kuramoto, Y. Shiraishi, M. Machida, K. Takano, N. Takase, T. Iida, J. Matsubara, Kazuya Takada
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p43
Gettering by Voids in Silicon: A Comparison with other Techniques
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546 K
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Authors: Vito Raineri
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p53
Gettering in Advanced Low Temperature Processes
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570 K
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Authors: S. Sadamitsu, S. Ogushi, Y. Koike, N. Reilly, T. Nagashima, Mizuka Sano, H. Tsuya
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p63
Metal Gettering by Defective Regions in Carbon-Implanted Silicon
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310 K
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Authors: R. Kögler, J.R. Kaschny, R.A. Yankov, P. Werner, A.B. Danilin, Wolfgang Skorupa
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p69
Metallic Impurity Gettering in MeV Implanted Si
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385 K
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Authors: O.V. Kononchuk, R.A. Brown, Sergei V. Koveshnikov, K.L. Beaman, F. Gonzalez, George A. Rozgonyi
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p75
Influence of Size and Density of Oxygen Precipitates of Internal Gettering Efficiency of Iron in Czochralski-Grown Silicon
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243 K
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Authors: H. Takahashi, Hiroshi Yamada-Kaneta, Masashi Suezawa
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p81
A Quantitative Method of Metal Impurities Depth Profiling for Gettering Evaluation in Silicon Wafers
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535 K
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Authors: Mohammad B. Shabani, T. Yoshimi, S. Okuuchi, A. Kaniava
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p91
Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon
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271 K
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Authors: Reinhart Job, Wolfgang R. Fahrner, Alexander G. Ulyashin, Yu.A. Bumay, A.I. Ivanov, L. Palmetshofer
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p97
Use of Gettering and Defect Induced Processes in Ultra-Thin Buried Oxide Synthesis
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294 K
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Authors: V.G. Litovchenko, A.A. Efremov, B.N. Romanyuk, V.P. Melnik, C. Claeys
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p103
Interaction of Impurities and Dislocations in Silicon before and after External Gettering
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587 K
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Authors: Isabelle Périchaud, Santo Martinuzzi