Design: New Material Challenge for Silicon ULSI |
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| Journal | Solid State Phenomena (Volumes 57 - 58) |
|---|---|
| Volume | Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by | C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages | 1-8 |
| DOI | 10.4028/www.scientific.net/SSP.57-58.1 |
| Citation | Lionel C. Kimerling, 1997, Solid State Phenomena, 57-58, 1 |
| Authors | Lionel C. Kimerling |
| Keywords | Cleaning Solutions, Environmental Issues, Gettering, Silicon |
| Full Paper | 
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