Paper Title:
Design: New Material Challenge for Silicon ULSI
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
1-8
DOI
10.4028/www.scientific.net/SSP.57-58.1
Citation
L. C. Kimerling, "Design: New Material Challenge for Silicon ULSI", Solid State Phenomena, Vols. 57-58, pp. 1-8, 1997
Online since
July 1997
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Price
$32.00
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