Paper Title:
The Influence of Intrinsic Point Defects on Getter Formation in Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
109-114
DOI
10.4028/www.scientific.net/SSP.57-58.109
Citation
M.G. Mil'vidskii, V. V. Voronkov, K.L. Enisherlova, V.J. Reznick, "The Influence of Intrinsic Point Defects on Getter Formation in Silicon Wafers", Solid State Phenomena, Vols. 57-58, pp. 109-114, 1997
Online since
July 1997
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Price
$32.00
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