Paper Title:
Comparison of External Gettering Efficiency of Phosphorus Diffusion, Aluminium-Silicon Alloying and Helium Implantation in Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
115-122
DOI
10.4028/www.scientific.net/SSP.57-58.115
Citation
N. Gay, S. Martinuzzi, "Comparison of External Gettering Efficiency of Phosphorus Diffusion, Aluminium-Silicon Alloying and Helium Implantation in Silicon Wafers", Solid State Phenomena, Vols. 57-58, pp. 115-122, 1997
Online since
July 1997
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Price
$32.00
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