Paper Title:
Mechanism of Slip Dislocation Generation by Oxide Precipitates in Czochralski Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
137-142
DOI
10.4028/www.scientific.net/SSP.57-58.137
Citation
K. Sueoka, M. Akatsuka, H. Katahama, N. Adachi, "Mechanism of Slip Dislocation Generation by Oxide Precipitates in Czochralski Silicon Wafers", Solid State Phenomena, Vols. 57-58, pp. 137-142, 1997
Online since
July 1997
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