Paper Title:
Low-Temperature Doping of P-Type Czochralski Silicon due to Hydrogen Plasma Enhanced Thermal Donor Formation
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
189-196
DOI
10.4028/www.scientific.net/SSP.57-58.189
Citation
A. G. Ulyashin, Y.A. Bumay, R. Job, G. Grabosch, D. Borchert, W. R. Fahrner, A.Y. Diduk, "Low-Temperature Doping of P-Type Czochralski Silicon due to Hydrogen Plasma Enhanced Thermal Donor Formation", Solid State Phenomena, Vols. 57-58, pp. 189-196, 1997
Online since
July 1997
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Price
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