Paper Title:
Hydrogen Annealed Silicon Wafer
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
19-26
DOI
10.4028/www.scientific.net/SSP.57-58.19
Citation
S. Nadahara, H. Kubota, S. Samata, "Hydrogen Annealed Silicon Wafer", Solid State Phenomena, Vols. 57-58, pp. 19-26, 1997
Online since
July 1997
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Price
$32.00
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