Paper Title:
Defect Formation during Erbium Implantation and Subsequent Annealing of Si:Er
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
257-262
DOI
10.4028/www.scientific.net/SSP.57-58.257
Citation
N.A. Sobolev, A.M. Emel'yanov, Y.A. Kudryavtsev, R.N. Kyutt, M.I. Makovijchuk, Y.A. Nikolaev, E.O. Parshin, V.I. Sakharov, I.T. Serenkov, E. I. Shek, K.F. Shtel'makh, "Defect Formation during Erbium Implantation and Subsequent Annealing of Si:Er", Solid State Phenomena, Vols. 57-58, pp. 257-262, 1997
Online since
July 1997
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Price
$32.00
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