Paper Title:
Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
27-36
DOI
10.4028/www.scientific.net/SSP.57-58.27
Citation
R. Habu, K. Kawakami, M. Hasebe, "Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal", Solid State Phenomena, Vols. 57-58, pp. 27-36, 1997
Online since
July 1997
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Price
$32.00
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