Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal |
| Journal |
Solid State Phenomena (Volumes 57 - 58) |
| Volume |
Gettering and Defect Engineering in Semiconductor Technology VII |
| Edited by |
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler |
| Pages |
27-36 |
| DOI |
10.4028/www.scientific.net/SSP.57-58.27 |
| Citation |
R. Habu et al., 1997, Solid State Phenomena, 57-58, 27 |
| Authors |
R. Habu, Kazuto Kawakami, Mitsuhiro Hasebe |
| Keywords |
Drift Flow, Ordinary Diffusion, Phenomenological Equations, Point Defect, Recombination Reaction, Temperature Gradient, Thermal Diffusion |
| Full Paper |
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