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Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal

Journal Solid State Phenomena (Volumes 57 - 58)
Volume Gettering and Defect Engineering in Semiconductor Technology VII
Edited by C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages 27-36
DOI 10.4028/www.scientific.net/SSP.57-58.27
Citation R. Habu et al., 1997, Solid State Phenomena, 57-58, 27
Authors R. Habu, Kazuto Kawakami, Mitsuhiro Hasebe
Keywords Drift Flow, Ordinary Diffusion, Phenomenological Equations, Point Defect, Recombination Reaction, Temperature Gradient, Thermal Diffusion
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