Paper Title:

Yield Analysis of CMOS Ics

Periodical Solid State Phenomena (Volumes 57 - 58)
Main Theme Gettering and Defect Engineering in Semiconductor Technology VII
Edited by C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages 327-336
DOI 10.4028/www.scientific.net/SSP.57-58.327
Citation D. Schmitt-Landsiedel, 1997, Solid State Phenomena, 57-58, 327
Authors D. Schmitt-Landsiedel
Keywords Critical Area, Defect Density, Failure Analysis, Low Voltage CMOS, Manufacturability, Matching, Parameter Variation, Yield
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