Paper Title:
The Role of Grown-in Defects in Advanced Silicon Technology
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
337-342
DOI
10.4028/www.scientific.net/SSP.57-58.337
Citation
G. Kissinger, D. Gräf, J. Vanhellemont, U. Lambert, H. Richter, "The Role of Grown-in Defects in Advanced Silicon Technology", Solid State Phenomena, Vols. 57-58, pp. 337-342, 1997
Online since
July 1997
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Price
$32.00
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