Paper Title:
Strain and Gettering in Epitaxial Silicon Wafers
  Abstract

  Info
Periodical
Solid State Phenomena (Volumes 57-58)
Edited by
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Pages
355-364
DOI
10.4028/www.scientific.net/SSP.57-58.355
Citation
F.G. Kirscht, M. B. Shabani, T. Yoshimi, S. B. Kim, B. Snegirev, C. M. Wang, L. Williamson, K. Takashima, P. Taylor, D. Lange, "Strain and Gettering in Epitaxial Silicon Wafers", Solid State Phenomena, Vols. 57-58, pp. 355-364, 1997
Online since
July 1997
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.